Research and Design of the Measurement and Control System of Low-temperature Plasma Equipment Based on CAN Bus and Ethernet

Abstract

According to the characteristics and control requirements of cryogenic plasma equipment system, a measurement and control system based on CAN bus and Ethernet is designed. In the system, the LM3S8962 chip is taken as the core chip, and the intelligent node controllers with CAN and Ethernet communication interface are designed, and the underlying equipment driver program is completed. The control program of each node and the man-machine interface with the host computer are also designed. The characteristic analysis and performance test of the network measurement and control system are carried out, and the expected functions are achieved.