Robust Design for MEMS Sensors Based on the Fuzzy Model

Xiaolan Tan, Lina Han, Jie Kang Jie

Abstract


First, the general theory of robust design based on fuzzy model is developed. Secondly, for a kind of capacitive MEMS pressure sensor as example, the robust design method is researched after the analyses of its structure and working principle. A mathematical model of robust design based on fuzzy model is developed. The results of robust design by programming are given.

Keywords


Robust design; Fuzzy design; MEMS sensor


DOI
10.12783/dtcse/itms2016/9484

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