A SysML Based Conceptual Framework for System Level Design in Micromechanical Electrical System

Abstract

The design of a microelectromechanical systems (MEMS) is a hard task due to the complexity of the systems. Model driven engineering approaches, like modelbased systems engineering (MBSE) and SysML provide a way for the systematic design of MEMS. However, the conceptual design of MEMS is an iterative and multidisciplinary issue, which makes a long time for design space exploration. In this study, a SysML based method is proposed to implement the system design and simulation models of MEMS product. The design process reaches from requirements specification to the detailed modeling and simulation of the system. This proposed method was illustrated by designing a high-resistivity silicon based patch antenna which is used as RF front in a Beidou receiver. The results showed that the SysML based information from the different diagrams of Beidou receiver and the multidisciplinary design phases can be connected and used during the development of new MEMS product, resulting in shortened development cycles.